Two-dimensional equations for piezoelectric thin-film acoustic wave resonators
نویسندگان
چکیده
منابع مشابه
Zinc Oxide Piezoelectric Thin Films for Bulk Acoustic Wave Resonators
・ Abstract – Characteristics of Zinc oxide (ZnO) piezoelectric thin films have been investigated for thin film bulk acoustic wave (BAW) resonators with relationship to bottom electrodes. A Metal/ZnO/Metal/SiO2 membrane structure, which has secondary harmonics, was adopted for the BAW resonators. The ZnO thin films, showed clear c-axis orientation, were made by rf sputtering on bottom electrodes...
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ژورنال
عنوان ژورنال: International Journal of Solids and Structures
سال: 2017
ISSN: 0020-7683
DOI: 10.1016/j.ijsolstr.2017.01.031